The Production Processes for Three-Dimensional Micro-Shapes. 3-Dimensional Processing by Micro Electro-discharge Machining.
نویسندگان
چکیده
منابع مشابه
Micro-Electro-Discharge Machining Technologies for MEMS
Advances in micromachining techniques have led to the evolution of micro-electromechanical systems (MEMS). These techniques are typically based on semiconductor manufacturing processes, which offer various advantages such as batch manufacturing of miniaturized devices and monolithic integration of microelectronics with the devices. Surface micromachining has been used to construct complex micro...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1995
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.61.1369